MEMS microphone with a micro Helmholtz resonator
Identifieur interne : 000191 ( Main/Exploration ); précédent : 000190; suivant : 000192MEMS microphone with a micro Helmholtz resonator
Auteurs : Hidetoshi Takahashi [Japon] ; Akira Suzuki [Japon] ; Eiji Iwase [Japon] ; Kiyoshi Matsumoto [Japon] ; Isao Shimoyama [Japon]Source :
- Journal of Micromechanics and Microengineering [ 0960-1317 ] ; 2012-08.
English descriptors
- Teeft :
- Cantilever, Cantilever microphone, Cantilever shape, Capacitive element, Capacitive micromachined, Commercial microphone, Conceptual diagram, Distance measurement, Distance measurements, Experimental setup, Gure, Helmholtz, Helmholtz resonator, High ratio, Horizontal axis, Ieee, Incident sound wave, Input signal, Mem, Mems microphone, Micro electro, Microeng, Micromech, Microphone, Original position, Output signal, Piezoresistive, Piezoresistive cantilever, Piezoresistive element, Piezoresistive layer, Pressure difference, Resistance change rate, Resonance frequencies, Resonance frequency, Resonator, Robot, Sensor, Sensor chip, Sensor response, Sio2 layer, Sound pressure, Sound pressure amplitude, Sound wave, Sound waves, Takahashi, Theoretical value, Time difference, Ultrasonic distance sensors, Ultrasonic waves, Unit sound pressure, Vertical axis, Wiring substrate.
Abstract
This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm1.2mm0.6mm and 130m40m0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.
Url:
DOI: 10.1088/0960-1317/22/8/085019
Affiliations:
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Le document en format XML
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scheme="Teeft" xml:lang="en"><term>Cantilever</term><term>Cantilever microphone</term><term>Cantilever shape</term><term>Capacitive element</term><term>Capacitive micromachined</term><term>Commercial microphone</term><term>Conceptual diagram</term><term>Distance measurement</term><term>Distance measurements</term><term>Experimental setup</term><term>Gure</term><term>Helmholtz</term><term>Helmholtz resonator</term><term>High ratio</term><term>Horizontal axis</term><term>Ieee</term><term>Incident sound wave</term><term>Input signal</term><term>Mem</term><term>Mems microphone</term><term>Micro electro</term><term>Microeng</term><term>Micromech</term><term>Microphone</term><term>Original position</term><term>Output signal</term><term>Piezoresistive</term><term>Piezoresistive cantilever</term><term>Piezoresistive element</term><term>Piezoresistive layer</term><term>Pressure difference</term><term>Resistance change rate</term><term>Resonance frequencies</term><term>Resonance frequency</term><term>Resonator</term><term>Robot</term><term>Sensor</term><term>Sensor chip</term><term>Sensor response</term><term>Sio2 layer</term><term>Sound pressure</term><term>Sound pressure amplitude</term><term>Sound wave</term><term>Sound waves</term><term>Takahashi</term><term>Theoretical value</term><term>Time difference</term><term>Ultrasonic distance sensors</term><term>Ultrasonic waves</term><term>Unit sound pressure</term><term>Vertical axis</term><term>Wiring substrate</term></keywords></textClass><langUsage><language ident="en">en</language></langUsage></profileDesc></teiHeader><front><div type="abstract">This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm1.2mm0.6mm and 130m40m0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.</div></front></TEI><affiliations><list><country><li>Japon</li></country><region><li>Région de Kantō</li></region><settlement><li>Tokyo</li></settlement><orgName><li>Université de Tokyo</li></orgName></list><tree><country name="Japon"><region name="Région de Kantō"><name sortKey="Takahashi, Hidetoshi" sort="Takahashi, Hidetoshi" uniqKey="Takahashi H" first="Hidetoshi" last="Takahashi">Hidetoshi Takahashi</name></region><name sortKey="Iwase, Eiji" sort="Iwase, Eiji" uniqKey="Iwase E" first="Eiji" last="Iwase">Eiji Iwase</name><name sortKey="Matsumoto, Kiyoshi" sort="Matsumoto, Kiyoshi" uniqKey="Matsumoto K" first="Kiyoshi" last="Matsumoto">Kiyoshi Matsumoto</name><name sortKey="Shimoyama, Isao" sort="Shimoyama, Isao" uniqKey="Shimoyama I" first="Isao" last="Shimoyama">Isao Shimoyama</name><name sortKey="Shimoyama, Isao" sort="Shimoyama, Isao" uniqKey="Shimoyama I" first="Isao" last="Shimoyama">Isao Shimoyama</name><name sortKey="Suzuki, Akira" sort="Suzuki, Akira" uniqKey="Suzuki A" first="Akira" last="Suzuki">Akira Suzuki</name><name sortKey="Takahashi, Hidetoshi" sort="Takahashi, Hidetoshi" uniqKey="Takahashi H" first="Hidetoshi" last="Takahashi">Hidetoshi Takahashi</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
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